HIGH CONTRAST IMAGING FOR METROLOGY APPLICATIONS

We have developed a new method of characterization by light with increased sensitivity. It is based on multiple interaction of the probe beam with the object of interest. The object is self-imaged between the interactions to preserve the spatial information. Our method proved to increase sensitivity for the effect of the object on probe intensity, phase or polarization.

Features

Both reflection and transmission setups
Applicable to microscopy (imaging), interferometry, holography, profilometry, polarimetry/ellipsometry
Classical trade-off between spatial resolution and a field of view

Benefits

Simple optical setup, easy to align
Increases the effect of the object on the amplitude (intensity), phase and/or polarization of the probe
Two or four-fold increase in measurement sensitivity (SNR) using passive optical elements only
Applicable to both quantitative and qualitative methods

How does it work?

Multiple interactions of the probe with theobject employing object self-imaging.
The self-imaging system can consist of a lensand spherical mirror, or an afocal system oflenses and planar mirror.

Results

Four-pass interferometry setup implemented for low density gas-jet characterization. SNR increases with the number of passes.

We offer

Theoretical and experimental know-how and a license to our patent.

Contact

Technology Transfer Office | tto@eli-beams.eu
Mrs. Miroslava Príbišová| e-mail: miroslava.pribisova@eli-beams.eu | mobile: +420 601 386 148

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