Modes of operation

• Focusing and target geometry (gas medium) adjusted to optimize the flux at requested wavelengths
• Single HHG beam/double beam configurations
• Monochromatized (using a grating monochromator or wavelength-selective multilayer optics)/multi-color radiation (as generated, i.e. a combination of high-order harmonics of the laser)
• Employment with synchronized pulses of VIS/IR or X-rays is allowed.

Diagnostics

• EUV spectrometer
• EUV wavefront sensor
• Energy meter.

Parameters of the radiation